Thin Film Viscous Thermal Flow Model

The flow submodel simulates thin film thermal flow and planarization process. The equations that govern the thin film flow are a set of partial differential equations which describe the momentum and mass balances along with appropriate boundary conditions. Basic Assumptions for the flow model are:

• the deposited film is isothermal;
• the physical properties of the film are not a function of position (isotropic);
• the melted film is incompressible, and Newtonian
• the flow is laminar

This figure illustrates the coordinate system and characteristic length scales used in the viscous flow model